Eliminating the Trade-Off between the Throughput and Pattern Quality of Sub-15 nm Directed Self-Assembly via Warm Solvent Annealing
Kim, JM (Kim, Jong Min), Kim, YJ (Kim, YongJoo), Park, WI (Park, Woon Ik), Hur, YH (Hur, Yoon Hyung), Jeong, JW (Jeong, Jae Won), Sim, DM (Sim, Dong Min), Baek, KM (Baek, Kwang Min), Lee, JH (Lee, Jung Hye), Kim, MJ (Kim, Mi-Jeong), Jung, YS (Jung, Yeon Sik)
ADVANCED FUNCTIONAL MATERIALS, 201501