Ring contact electrode process for high density phase change random access memory
Ryoo, KC, Song, YJ, Shin, JM, Park, SS, Lim, DW, Kim, JH, Park, WI, Sim, KR, Jeong, JH, Kang, DH, Kong, JH, Jeong, CW, Oh, JH, Park, JH, Kim, JI, Oh, YT, Kim, JS, Eun, SH, Lee, KW, Koh, SP, Fai, Y, Koh, GH, Jeong, GT, Jeong, HS, Kim, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 200704