Hard x-ray nano patterning using a sectioned multilayer
Lee, SY[Lee, Su Yong], Cho, IH[Cho, In Hwa], Kim, JM[Kim, Jae Myung], Yan, HF[Yan, Hanfei], Conley, R[Conley, Ray], Liu, CA[Liu, Chian], Macrander, AT[Macrander, Alb, Maser, J[Maser, Joerg], Stephenson, GB[Stephenson, G, Kang, HC[Kang, Hyun Chul], Noh, DY[Noh, Do Young]
Journal of Applied Physics, 201102