Annealing effects of aluminum silicate films grown on Si(100)
Cho, MH[Cho, MH], Rho, YS[Rho, YS], Choi, HJ[Choi, HJ], Nam, SW[Nam, SW], Ko, KH[Ko, KH], Ku, JH[Ku, JH], Kang, HC[KANG, HYUN CHUL], Noh, DY[NOH, DO YOUNG], Whang, CN[Whang, CN], Jeong, K[Jeong, K]
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 200205