Structural and electrical characteristics of Y2O3 films grown on oxidized Si(100) surface
Cho, MH[Cho, MH], Ko, DH[Ko, DH], Choi, YG[Choi, YG], Jeong, K[Jeong, K], Lyo, IW[Lyo, IW], Noh, DY[Noh, DY], Kim, HJ[Kim, HJ], Whang, CN[Whang, CN]
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 200101