Development of a novel wet cleaning solution for Post-CMP SiO2 and Si3N4 films

Hybrid Thin-Film Materials Combinations for Complementary Integration Circuit Implementation

Auxiliary mechanism of in-situ micro-nano bubbles in oxide chemical mechanical polishing

Energy-Band Engineering by Remote Doping of Self-Assembled Monolayers Leads to High-Performance IGZO/p-Si Heterostructure Photodetectors

Investigation of abrasive behavior between pad asperity and oxide thin film in chemical mechanical planarization

Improvement of oxide removal rate in chemical mechanical polishing by forming oxygen vacancy in ceria abrasives via ultraviolet irradiation

Bioaerosol monitoring by integrating DC impedance microfluidic cytometer with wet-cyclone air sampler

Uniform deposition method of monodispersed SiO2 nanoparticles on a 300-mm Si wafer surface

Concurrent and Selective Determination of Dopamine and Serotonin with Flexible WS2/Graphene/Polyimide Electrode Using Cold Plasma

The effects of alpha irradiation on the optical reflectivity of composite polymers