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전체 논문

124

21

Fast Inspection of Non-Visual Defects in the Wafer Surface Using Two Low-Energy E-Beam Sources
김대욱, 안성준, 오태식, 김대욱, 안승준
Materials Science Forum, 2012

22

Low energy microcolumn for large field view inspection
Kim, YC, Ahn, SJ, Oh, TS, Kim, DW, Kim, HS, Jang, WK
ULTRAMICROSCOPY, 2011

23

A Study on the Characteristics of the Polycrystalline Silicon Annealed by the SHG Nd:YAG Laser
김대욱, Young chul Kim, Ho Seob Kim, Seong Joon Ahn, Seungjoon Ahn
Materials Science Forum, 2011

24

Design of the miniaturized free electron laser module as an efficient source of the THz waves
Kim, YC, Ahn, SJ, Kim, HS, Kim, DW, Ahn, S
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011

25

Inspection of open defects in a thin film transistor-liquid crystal display panel by using a low-energy electron microcolumn
Oh, TS, Kim, DW, Kim, YC, Ahn, S, Lee, GH, Kim, HS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010

26

Inspection method for contact/via-holes using a low-energy electron microcolumn
Kim, YC, Kim, DW, Ahn, S, Oh, TS, Kim, JB, Roh, YS, Hasko, DG, Kim, HS, Kim, DW, Oh, TS, Kim, JB, Hasko, DG, Kim, HS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009

27

Photo-mask fabrication by low-energy microcolumn lithography
Kim, HS, Ahn, S, Kim, DW, Kim, YC, Ahn, SJ, Ahn, S, Kim, YC, Ahn, SJ
MICROELECTRONIC ENGINEERING, 2009

28

Optimization of electrostatic lens systems for low-energy scanning microcolumn applications
Oh, TS, Kim, DW, Ahn, S, Kim, YC, Kim, HS, Ahn, SJ
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008

29

Feasibility Study of TFT-LCD Array Tester Using Low Voltage Micro-columns
김대욱
microelectrnic engineering - 직접입력, 2008

30

Optimization of light-surface plasmon coupling by periodicity regulation for a pyramidal probe
김대욱
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2008