The effect of SiCl4 additive gas on the Cl-based Al plasma etch procedure

Arrayed Microcolumn Operation with a Wafer-scale Einzel Lens

Influence of the oxidation in the metal silicide/Si3N4 interfaces on the etching profile

Modeling of Nanoscale Oxide Aperture Opening for NSOM Probe

Fabrication of a Double Aperture for Near-field Optical Trapping

Squeezed States for the General Time-Dependent Harmonic Oscillator with and without a Singularity

Multi-Beam Microcolumns Based on Arrayed SCM and WCM

Optimization procedures for metal-coated NSOM aperture array

Fabrication of a sub-wavelength size aperture from a nanosize Si tip using field emission techniques

Analysis of the aperture formation mechanism in the fabrication process of nano-aperture arrays