발행물

논문
특허
저서
컨퍼런스

전체 논문

124

31

Efficient electron beam condensing for low-energy microcolumn lithographye
Kim, HS, Ahn, S, Kim, DW, Oh, TS, Ahn, SJ
MICROELECTRONICS JOURNAL, 2008

32

Study on the recognition of the registration marks for low-energy microcolumn lithography
Ahn S., Kim H.S., Kim D.-W., Ahn S.J.
Materials Science Forum, 2008

33

Examination of the Optical Transmission through Metallic Nano-Apertures
김대욱
Physica Status Solidi (C) Current Topics in Solid State Physics, 2007

34

Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern
Ahn S., Kim D.W., Kim H.S., Park C.G., Ahn S.J.
Materials Science Forum, 2007

35

Stability enhancement for cold field emitter for reliable operation of the micro-column system
Kim J.H., Ahn S.J., Park C.G., Kim H.S., Kim D.W., Ahn S.
Materials Science Forum, 2007

36

Electron beam induced SiO2 etch selectivity and its application to oxide nano-aperture formation
김대욱
MICROELECTRONIC ENGINEERING, 2006

37

NEMS fabrication of metal coated sub-wavelength size aperture array and its optical characterization
Kim, JW, Moon, JS, Kim, DW, Jung, MY, Ok, JT, Choi, SS, Lim, HJ, Yang, JS, Boo, JH
THIN SOLID FILMS, 2006

38

Low energy electron beam microcolumn lithography
김대욱
MICROELECTRONIC ENGINEERING, 2006

39

Improvement of the core loss of SiFe by optimizing the operation conditions of the laser scribing
Ahn S.J., Park C.G., Lim J.S., Baik K.H., Kim D.W., Kim H.S., Ahn S.
Materials Science Forum, 2006

40

Fabrication of a high-throughput near-field optical probe using a double metal layer
김대욱
nanotechnology - 직접입력, 2005