,

플라즈마를 이용한 원자스케일 공정 전산모사

,

Topography simulation of nanoscale device fabrication process

,

Study on effective functionalization of nanowire FET Sensor for harmful gas

,

Diagnosis of additive gas into fluorocarbon-based etchant gases on the plasma etching process

,

Experiment and theoretical study on the effect of various surface morphology for highly sensitive ion-sensitive semiconductor nanowire sensors