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Surface reaction modeling for Oxygen dffect in fluorocarbon plasma etch process

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3D Feature profile simulation for oxide etching under fluorocarbon/oxygen mixture plasma

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3D Feature Profile Simulation of Cyclic Fluorocarbon Atomic layer Etching Process

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Needle Type Biological Nanowire Sensor Using Cost Effective and Mass-producible Fabrication Route

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Realistic plasma surface reaction model for cyclic fluorocarbon atomic layer etching process