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Simulation of the kinetic models of plasma deposition and etching in semiconductor fabrication

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3D feature profile simulations for deep contact hole etching of next generation devices

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Cost Effective and Mass-Producible Fabrication Route of Chemical and Biological Nanowire Sensor

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Advanced 3D feature profile simulation with a realistic plasma surface reactio model

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Cost effective and mass producible platform to fabricate chemical and biology nanowire sensors