,

3D Charge-up simulation coupled with realistic plasma surface reaction model in plasma etch process

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Nano-imprinted nanowire device coupled with plasma process for chemical and biological sensors

,

Study on solution-gating effects of nanowire field effect transistors fabricated by top-down method

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Charge-up simulation coupled with unified semi-global surface model for UHARC plasma etching in semiconductor fabrication

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Realistic Plasma Etch Simulation for High Aspect Ratio Contact Hole using Graphics Processing Units