,

Large scale feature profile simulation for plasma etch process of high aspect ratio contact hole

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3D feature profile simulation of mask effects of mask effects in high aspect contact hole etch process

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Silicon oxide surface reaction modeling coupled with global bulk plasma model in niductive coupled fluorocarbon plasmas

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GPU based 3D feature profile simualation of high aspect ratio contact hole etch process under fluorocarbon plasmas

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Ultra-fast 3D etch profile simulation coupled with realistic plasma database