,

GPU based 3D feature profile simulation for ultra-high deep etch process in inductively coupled fluorocarbon plasmas

,

Direct observation in surface charge variation during functionalization steps of nanowire field-effect transistor-based biosensors

,

Plasma surface kinetics studies of silicon dioxide etch process in inductively coupled fluorocarbon plasmas

,

Study on Biocompatibility of Functionalized ZnO Nanowire Toward Single Cell Monitoring

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3D feature profile simulation based on realistic surface kinetics studies of silicon dioxide etch process in fluorocarbon plasmas