발행물

전체 논문

138

111

ITO Deposition by Reactive dc Sputtering with Ozone Introduction
Y. Shigesato, N. Ito, M. Kon, P. K. Song
J. Vac. Soc. Jpn.,

112

Study on Fluorine-Doped Indium Oxide Films Deposited by RF Magnetron Sputtering
Shin, M. Kamei, P. K. Song, I. Yasui
Jpn. J. Appl. Phys.,

113

Electrical and Structural Properties of Tin-doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature
P. K. Song, Y. Shigesato, M. Kamei, I. Yasui
Jpn. J. Appl. Phys., 1999

114

Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering
P. K. Song, H. Akao, M. Kamei, Y. Shigesato, I. Yasui
Jpn. J. Appl. Phys., 1999

115

Structural Control of TCO Films
P. K. Song, Y. Shigesato
The Journal of the Surface Finishing Society of Japan, 1999

116

The Trend of Transparent Conductive Films based In2O3
P. K. Song, Y. Shigesato
Monthly DISPLAY, 1999

117

Zinc Oxide as Transparent Conductive Films
P. K. Song, Y. Shigesato
MATERIALS INTEGRATION/ ELECTRONIC CERAMICS, 1999

118

Near Infrared Reflecting Properties of TiO 2 /Ag/TiO 2 Multilayers Prepared by DC/RF Magnetron Sputtering
김성한, 김서한, 송풍근
대한금속재료공학회지, 2017

119

포토리소그래피 공정으로 제작된 터치스크린패널용 금속메시
김서한, 송풍근
한국표면공학회지, 2016

120

반응성 DC 마그네트론 스퍼터링법으로 증착한 ITO 박막의 전기적 특성 평가
김민제, 정재헌, 송풍근
한국표면공학회지, 2014