발행물

전체 논문

138

101

Photoinduced Hydrophilicity of Epitaxially Grown TiO2 Films by RF Magnetron Sputtering
P. K. Song, M. Yamagishi, H. Odaka, Y. Shigesato
Jpn. J. Appl. Phys., 2003

102

Study on In2O3-SnO2 transparent and conductive films prepared by dc magnetron sputtering using high density ceramic targets
K. Utsumi, H. Iigusa, R. Tokumaru, P. K. Song, Y. Shigesato
Thin Solid Films, 2003

103

Al-Doped ZnO Films Deposited by Reactive Magnetron Sputtering in MF Mode with Dual Cathodes
M. Kon, P. K. Song, Y. Shigesato, P. Frach, A. Mizukami, K. Suzuki
Jpn. J. Appl. Phys., 2002

104

Electrical and optical properties of gallium doped zinc oxide films deposited by dc magnetron sputtering
P. K. Song, M. Watanabe, M. Kon, A. Mitsui, Y. Shigesato
Thin Solid Films, 2002

105

Crystallinity and stoichiometry of InNx films deposited by reactive dc magnetron sputtering
P. K. Song, D. Sato, M. Kon, Y. Shigesato
Vacuum, 2002

106

Structural and Photocatalytic Properties of Epitaxial TiO2 Films Deposited by Sputtering
M. Yamagishi, Y. Irie, P. K. Song, Y. Shigesato, H. Odaka
Kougyou Zairyou, 2002

107

Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by
,

108

Properties of Epitaxial TiO2 Films Deposited by Sputtering
M. Yamagishi, Y. Irie, P. K. Song, Y. Shigesato, H. Odaka
KougyouZairyou,

109

Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas
M. Kon, P. K. Song, A. Mitsui, Y. Shigesato
Jpn. J. Appl. Phys., 2002

110

Deposition Of High Performance Ceramic Thin Films by Sputtering Method
P. K. Song, Y. Shigesato
Jpn. C.T.I, 2000