발행물

전체 논문

138

81

Properties of ITO films deposited with different conductivity ITO targets
J.H. Park, S.C. Lee, P.K. Song
METALS AND MATERIALS INTERNATIONAL, 2007

82

High rate deposition of tin-doped indium oxide films by reactive magnetron sputtering with unipolar pulsing and plasma emission feedback systems
S. Ohno, Y. Kawaguchi, A. Miyamura, Y. Sato, P.K. Song, M. Yoshikawa, P. Frach, Y. Shigesato
Science and Technology of Advanced Materials, 2006

83

Structural, electrical, and optical properties of transparent conductive In2O3-SnO2 films
Y. Sato, R.Tokumaru, E. Nishimura, P.K.Song, Y. Shigesato
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005

84

Electrical and optical properties of amorphous indium zinc oxide films
N. Ito, Y. Sato, P.K.Song, A. Kaijio, K. Inoue, Y. Shigesato
THIN SOLID FILMS, 2005

85

Crystallinity and photocatalytic activity of TiO2 films deposited by reactive sputtering with frequency substrate bias
P.K.Song, Y. Irie, Y. Shigesato
THIN SOLID FILMS, 2005

86

Syntheses and mechanical properties of TiAlCxN1-x coatings deposited by arc ion plating
C. S. Jang, J. H. Jeon, P. K. Song, M. C. Kang, K. H. Kim
SURFACE & COATINGS TECHNOLOGY, 2005

87

1-x coatings deposited by arc ion plating
C. S. Jang, J. H. Jeon, P. K. Song, M. C. Kang, K. H. Kim
SURFACE & COATINGS TECHNOLOGY, 2005

88

GaN Films Deposited by DC Reactive Magnetron Sputtering
P. K. Song, E. Yoshida, Y. Sato, K. H. Kim, Y. Shigesato
Jpn. J. Appl. Phys., 2004

89

Crystallinity and Photocatalytic Activity of TiO2 Films Deposited by Reactive Sputtering Using Various Magnetic Field Strengths
P. K. Song, Y. Irie, S. Ohno, Y. Sato, Y. Shigesato
Jpn. J. Appl. Phys., 2004

90

Crystal Structure and Photocatalytic Activity of TiO2 Films Deposited by Reactive Sputtering Using Ne, Ar, Kr, or Xe Gases
Jpn. J. Appl. Phys., 2004