김병조 교수 연구실
컨퍼런스
76th Annual Gaseous Electronics Conference
Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
2023
2023
International Conference on Simulation of Semiconductor Processes and Devices
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential
2023
2023
75th Annual Gaseous Electronics Conference
Plasma chamber design method combined with plasma deep learning model and optimization algorithm
2022
2022
75th Annual Gaseous Electronics Conference
Deep learning model for ion sputtering dynamics with molecular dynamics simulation
2022
2022
22nd IEEE International Conference on Nanotechnology
Multiscale simulation on plasma-surface interaction: industrial plasma processing
2022
2022