,

Tailoring Composition of N-doped In2O3 Grown by Atomic Layer Deposition for Optimizing the Ferromagnetic and Semiconductor Properties

,

Plasma-enhanced Atomic Layer Deposition of TiN/Mo2N Stacks for Advanced Strorage Nodes in Next-generation DRAM Capacitors

,

Fabrication of MoO2 Electrode by Thermal Atomic Layer Deposition for High-performance TiO2-Based DRAM Capacitors

,

Atomic Layered Deposition of SnO2 Thin Films Using a Novel Sn Precursor

,

Achieving Low Resistivity and Superior Thermal Stability of Sub-5 nm Atomic Layer Deposited Ru Films by Introducing Ultrathin Oxide Caping Layers