The effect of dry etching condition on the performance of blue micro light-emitting diodes with reduced quantum confined Stark effect epitaxial layer
Lee, DS[Lee, Dong-Seon], Park, JH[Park, Jeong-Hwan], Ushida, Y[Ushida, Yasuhisa], Lee, DH[Lee, Da-Hoon], Ando, Y[Ando, Yuto], Furusawa, Y[Furusawa, Yuta], Honda, Y[Honda, Yoshio], Cai, W[Cai, Wentao], Cheong, H[Cheong, Heajeong], Seong, TY[Seong, Tae-Yeon], Amano, H[Amano, Hiroshi]
Journal of Applied Physics, 202204