발행물

전체 논문

6

1

Low-temperature atomic layer deposition of metastable MnTe films for phase change memory devices
유찬영, 전광식, 전정우, 김우현, 김대현, 노원태, 최원호, 박병우, 전상민, 김승진, 황철성
Journal of Materials Chemistry C, 202502

2

Influence of Ge precursors toward atomic layer deposition of germanium tellurides: A DFT study
유찬영, 조현, 송봉근
Vacuum, 202502

3

Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating
Kim, Jae-Hwan, Yoo, Chanyoung, Park, Seungho, Hwang, Jin-Ha, Oh, Youkeun, Kim, Dokyun, Kim, Dohyoung, Cho, Jeong-Won, Hwang, Heesu, Noh, Young-Soo, Lee, Myeong-Ill, Bae, Seung-Muk, Cheon, Taehoon
CERAMICS INTERNATIONAL, 202411

4

Atomic layer deposition of Sn-doped germanium diselenide for an As-free Ovonic threshold switch with low off-current
유찬영, 박병우, 전정우, 김우현, 최원호, 전광식, 전상민, 김승진, 임준영, 성용훈, David Ahn, 황철성
DALTON TRANSACTIONS, 202411

5

Atomic Layer Deposition of WO3-Doped In2O3 for Reliable and Scalable BEOL-Compatible Transistors
유찬영, Jonathan Hartanto, Balreen Saini, Wilman Tsai, Vivek Thampy, Somayeh Saadat Niavol, Andrew C. Meng, Paul C. McIntyre
Nano Letters, 202404

6

Vertically Stackable Ovonic Threshold Switch Oscillator Using Atomic Layer Deposited Ge0.6Se0.4 Film for High-Density Artificial Neural Networks
유찬영, 전정우, 박병우, 장윤호, 이수형, 전상민, 류승규, 김경도, 심성근, 정선우, 최원호, 전광식, 김성진, 한장욱, 황철성, 한준규
ACS APPLIED MATERIALS & INTERFACES, 202403