Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating
Kim, Jae-Hwan, Yoo, Chanyoung, Park, Seungho, Hwang, Jin-Ha, Oh, Youkeun, Kim, Dokyun, Kim, Dohyoung, Cho, Jeong-Won, Hwang, Heesu, Noh, Young-Soo, Lee, Myeong-Ill, Bae, Seung-Muk, Cheon, Taehoon
CERAMICS INTERNATIONAL, 202411