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Fabrication of silicon nano-ribbon and nano-FETs by using AFM anodic oxidation

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Channel geometry-dependent characteristics in silicon nano-ribbon and nanowire FET for sensing applications

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원자힘현미경을 이용한 탄화규소 미세 패터닝의 Scanning Kelvin Probe Microscopy 분석

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Control of junction profiles of nano-structured patterns by using atomic force microscopy anodic oxidation

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Fabrication and characterization of nano-channel FETs patterned by AFM anodic oxidation