Effects of Post-annealing and Co Interlayer Between SiNx and Cu on the Interfacial Adhesion Energy for Advanced Cu Interconnections
Lee, H[Lee, Hyeonchul], Jeong, M[Jeong, Minsu], Kim, G[Kim, Gahui], Son, K[Son, Kirak], Seo, J[Seo, Jeongmin], Kim, TS[Kim, Taek-Soo], Park, YB[Park, Young-Bae]
ELECTRONIC MATERIALS LETTERS, 2020