Ellipsometry

Gaertner Scientific Corporation  /  L116D - Light Sources : HeNe 632.8nm Gas Laser  - Beam Diameter : 1 mm diameter (1 x 3 mm on wafer @ 70º) - Repeatability : ≤ 1 angstrom  - Measuring Time : 3 sec 담당자 : 조석호, 홍주안

Probe Station

MSTECH / MST 4000A - 3-probe system - 6" chuck - CCD Camera HP / 4284A LCR Meter - 1 MHz - 40 V DC bias HP / 4145B Semiconductor Parameter  Analyzer - 100 mA, 100 V - Resolution:  <1 pA 담당자 : 김주형, 정상연

4-Point Probe

AiT(Advanced Instrument Technology) / CMT-100A - Current Source Range : 5nA ~ 160mA - Sheet Resistance Measuring Range : 1 mohm/sq ~ 2Mohm/sq - Resistivity Measureing Range : 10u ~ 20kohm. cm - Measurement Accuracy ± 0.5% - Wafer : Max 200mm x 200mm 담당자 : 조석호, 정상연