,

Comparison of Chlorine- and Fluorine-based Inductively Coupled Plasmas for Dry Etching of PZT and Pt Thin Films

,

Fabrication of embedded bottom electrodes for submicron beam resonators

,

characteristic study of hermetic package for RF MEMS switch

,

a micromachined slot-coupled circular patch antenna

,

Fabrication and characterization of RF MEMS package based on LTCC lid substrate and gold-tin eutectic bonding