발행물
컨퍼런스
The 20th International Conference on Micro Electro Mechanical Systems
,
Mechanically robust single crystalline silicon (SCS) single-pole double-throw (SPDT) MEMS switch and its application to dual-band WLAN filter
International SoC Design Conference
Release technique using aluminum etch stop layer for MMIC mounted movable RF MEMS antenna
International Conference on Experimental Mechanics
A study of nano-indentation test using rhombus-shaped cantilever in atomic force microscope
The 13th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers ’0
Mechanically reliable MEMS variable capacitor using single crystalline Silicon(SCS) structure
Packaging method for RF MEMS devices using LTCC capping substrate and BCB adhesive bonding