200-mm Si CMOS Process-Compatible Integrated Passive Stack for Millimeter-Wave Monolithic 3-D integration
M. Park, J. Song, J. Jeong, J. -T. Lim, J. -H. Song, W. -C. Lee, G. Sim, H. Cho, D. Yoo, M. Kang, H. Ko, J. Lee, K. Yang, C. -Y. Kim, Y. Kim, W. -S. Sul, S. -H. Kim, J. Lee*
IEEE Transactions on Electron Devices, 2023