발행물
컨퍼런스
제12회 한국MEMS학술대회
2010
,
나노 크기의 수직 기공을 갖는 원주형 크롬 박막을 이용한 MEMS 소자의 웨이퍼 레벨 진공 패키징에 관한 연구
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays
Study of a new spring structure for a mechanically reliable micromirror
Maneuvering actuation voltage of a electrostatic MEMS switch with a new coplanar pre-charged electrode
2009 International Electron Devices Meeting, IEDM 2009
2009
3-Terminal nanoelectromechanical switching device in insulating liquid media for low voltage operation and reliability improvement