발행물

전체 논문

132

111

Multiple-surface interferometry of highly reflective wafer by wavelength tuning
OPTICS EXPRESS, 2014

112

Design of phase shifting algorithms: fringe contrast maximum
OPTICS EXPRESS, 2014

113

Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer
OPTICS AND LASERS IN ENGINEERING, 2013

114

Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry
OPTICAL REVIEW, 2012

115

Development of Gaussian Window Function for Precision Topography of Silicon?Wafer Surface Using Wavelength?Modulation Interferometry
Yusuke Ito, Naohiko Sugita, 김양진, 배준철
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 202412

116

Design of phase-reconstruction algorithm: insensitivity to intensity modulation
Yusuke Ito, Naohiko Sugita, 박상후, 김양진, 김송길, 이하범, 김성태
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 202407

117

Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning
Naohiko Sugita, 김양진, 전주림
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 202309

118

Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer
Naohiko Sugita, Mamoru Mitsuish, 김양진, 김성태
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 202303

119

경량 금속 기지 복합재와 에어 베어링을 활용한 공작기계 주축의 동적 안정성 향상 방안
김정환, 이상관, 조승찬, 김양진, 배원준
대한기계학회논문집 A, 202302

120

Interferometric thickness assessment of optical flat by combining iterative analysis and wavelength tuning
김성태, Mamoru Mitsuish, Kenichi Hibino, Naohiko Sugita, The University of Tokyo, The University of Tokyo, AIST, 김양진, 부산대학교
OPTIK, 202209