발행물

전체 논문

331

151

Diamond structure-dependent pad and wafer polishing performance during chemical mechanical polishing
Atul Kulkarni, Cheolmin Shin, Eungchul Kim, Hojoong Kim, Kangjun Kim, Sanghuck Jeon, Yinhua Jin, 김태성
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018

152

Thickness-dependent humidity sensing by poly(vinyl alcohol) stabilized Au-Ag and Ag-Au core-shell bimetallic nanomorph resistors
Ajayan Vinu, Chung Kil Song, Dinesh Amalnerkar, Haiwon Lee, Hyeong-U Kim, Parag Adhyapak, Rohini Aiyer, Sreekantha Reddy Dugasani, Venkatesan Renugopalakrishnan, 김태성, 박성하
ROYAL SOCIETY OPEN SCIENCE, 2018

153

Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer
김태성
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018

154

Monitoring the Physicochemical Degradation of Polishing Pad Soaked in Hydrogen Peroxide during Chemical Mechanical Polishing
김태성
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2018

155

Morphological Evolution of Nanorod to Submicron Brick-Like Cobalt Oxide Structures Under Microwave Solvothermal Regime
Chisung Ahn, Dinesh Amalnerkar, Manish Shinde, Nilam Qureshi, Sunit Rane, 김태성
SCIENCE OF ADVANCED MATERIALS, 2018

156

Trace Metals Optimization in Ceria Abrasive for Material Removal Rate Enhancement during ILD CMP
김태성
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017

157

Investigation of Copper Oxide Ring Formation during Post Chemical Mechanical Polishing Cleaning of Cu Interconnect
김태성
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017

158

Note: Electric field assisted megasonic atomization for size-controlled nanoparticles
김태성
REVIEW OF SCIENTIFIC INSTRUMENTS, 2017

159

Investigation of the pad-conditioning performance deterioration in the chemical mechanical polishing process
김태성
WEAR, 2017

160

Instantaneous Synthesis of Faceted Iron Oxide Nanostructures Using Microwave Solvothermal Assisted Combustion Technique
김태성
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017