Electrical properties of SiO2 films with embedded nanoparticles formed by SiH4/O-2 chemical vapor deposition
Rassel RM, Kim T, Shen Z, Campbell SA, McMurry PH
JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, 2003
282
Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, modeling, and film properties
Kim T, Suh SM, Girshick SL, Zachariah MR, McMurry PH, Rassel RM, Shen Z, Campbell SA
JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002
283
Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate glass films
Rao NP, Nijhawan S, Kim T, Wu Z, Campbell S, Kittelson D, McMurry P, Cheng CC, Mastromatteo E
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998
284
Machine Learning-Based Prediction of Atomic Layer Control for MoS2 via Reactive Ion Etcher
Choi, Min Sup, Kim, Changmin, Kim, Hyeong-U, Kim, Muyoung, Lee, Seunghwan, 김태성
Applied Science and Convergence Technology, 202309
285
Development of a single particle sizing system for monitoring abrasive particles in chemical mechanical polishing process (Feb, 10.1007/s12206-023-0218-y, 2023)
김창민, 김태성, 김형우, 최성원, 최정안
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 202302
286
Stretchable optical fiber strain sensor comprising zinc oxide and PDMS for human motion monitoring
Kim, Eungchul, Shin, Dongjoo, Woo, Gunhoo, 김태성
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 202301
287
Surface and diffusive capacity controlled electrochemistry in nickel boride/nickel borate