Suppression of boron diffusion using carbon co-implantation in DRAM
Lee, S.H., Park, S.G., Kim, S.D., Jung, H.-C., Kim, I.G., Kang, D.-H., Kim, D.J., Lee, K.P., Choi, J.S., Baek, J.W., Choi, M., Park, Y., Choi, C., Park, J.-H.*
Materials Research Bulletin, Materials Research Bulletin, 2016