Effects of point defect healing on phosphorus implanted germanium n+/p junction and its thermal stability
Shim, J., Shin, J., Lee, I., Choi, D., Baek, J.W., Heo, J., Park, W., Leem, J.W., Yu, J.S., Jung, W., Saraswat, K., Park, J.-H.*
J. Appl. Phys. 114, 094515, 2013