Effects of point defect healing on phosphorus implanted germanium n(+)/p junction and its thermal stability
Shim, J (Shim, Jaewoo), Shin, JH (Shin, Jeong-hun), Lee, IY (Lee, In-Yeal), Choi, D (Choi, Daebeom), Baek, JW (Baek, Jung Woo), Heo, J (Heo, Jonggon), Park, W (Park, Wonkyu), Leem, JW (Leem, Jung Woo), Yu, JS (Yu, Jae Su), Jung, WS (Jung, Woo-Shik), Saraswat, K (Saraswat, Krishna, Park, JH (Park, Jin-Hong)...Mo
JOURNAL OF APPLIED PHYSICS, 201309