Kernel-Density-Based Particle Defect Management for Semiconductor Manufacturing Facilities

Principal curve-based monitoring chart for anomaly detection of non-linear process signals

Real-time contrasts control chart using random forests with weighted voting

Density weighted support vector data description

Algorithm learning based neural network integrating feature selection and classification

Advanced Nano-Scale Process Control Using the Back-Propagation Network and Dual Filter Exponentially Weighted Moving Average

A New Nonlinear Self-Tuning Run-to-Run Controller for the Semiconductor Manufacturing Process

Control Chart Pattern Recognition of Manufacturing Process Using Wavelet Feature-Based Artificial Neural Networks

Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average

Analysis of the time dependency of ammonia-oxidizing bacterial community dynamics in an activated sludge bioreactor