KISM 2025 BUSAN

Real-time Temperature Monitoring of Wafer Chuck and Focus Ring at Ar plasma

2025

78th Annual Gaseous Electronics Conference (GEC2025)

Measurement of Plasma Density Using an Electrode Sensor on Wafer in an Inductively Coupled Plasma and Comparison with Other Diagnostic Methods

2025

KISM 2025 BUSAN

Etching Characteristics of Silicon Nitride Using NF3/NH3 Plasma in a Cryogenic Reactive Ion Etching System

2025

78th Annual Gaseous Electronics Conference (GEC2025)

Real-Time Plasma Density Measurement using a Capacitance Measurement Sensor Embedded in an Electrostatic Chuck

2025

78th Annual Gaseous Electronics Conference (GEC2025)

Real-time temperature monitoring of wafer and focus ring during plasma processing

2025