발행물

전체 논문

2601

2291

Experimental investigations on particle contamination of masks without protective pellicle during vibration or shipping of mask carriers
김정현, 육세진, Fissan, H, Asbach, C, Dutcher, DD, Yan, PY, Pui, DYH
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2007

2292

Experimental investigations of protection schemes for extreme ultraviolet lithography masks in carrier systems against horizontal aerosol flow
김정현, 육세진, Fissan, H, Asbach, C, van der Zwaag, T, Engelke, T, Yan, PY, Pui, DYH
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2007

2293

Numerical evaluation of protection schemes for EUVL masks in carrier systems against horizontal aerosol flow
김정현, Engelke, T, van der Zwaag, T, Asbach, C, Fissan, H, 육세진, Pui, DYH
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007

2294

Evaluation of protection schemes for extreme ultraviolet lithography (EUVL) masks against top-down aerosol flow
김정현, Se-Jin Yook, Heinz Fissan, Christof Asbach, Jing Wang, Pei-Yang Yan, David Y.H.Pui
Journal of Aerosol Science - 직접입력, 2007

2295

Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions
김정현, Asbach, C, Fissan, H, Yook, SJ, Pui, DYH
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007

2296

Simulations of Methane Adsorption and Diffusion within Alkoxy-Functionalized IRMOFs Exhibiting Severely Disordered Crystal Structures
Young Ho Jhon, Mi Young Cho, Hak Rime Jeon, Ilgeun Park, Rakwoo Chang, Jesse L. C. Rowsell, Jaheon Kim
The Journal of Physical Chemistry C, 2007

2297

Structure and dynamics of short chain molecules in disordered porous materials: A molecular dynamics simulation study
Rakwoo Chang, Arun Yethiraj
The Journal of Chemical Physics, 2007

2298

Control of silicidation in HfO2/Si(100) interfaces (vol 86, art. no. 041913, 2005)
Cho, DY, Park, KS, Choi, BH, Oh, SJ, Chang, YJ, Kim, DH, Noh, TW, Jung, R, Lee, JC, Bu, SD
APPLIED PHYSICS LETTERS, 2007

2299

Transport and microscopic investigations on the electric-pulse-induced phase transition of VO2 films
J.S. Lee, Michele Ortolani, A. Ginolas, Young Jun Chang, Tae Won Noh, U. Schade
Physica C Superconductivity, 2007

2300

Surface vs. Bulk Characterizations in Electronic Inhomogeneity of a VO2 thin film.
Young Jun Chang, Junyi Yang, T.W. Noh, D.-W. Kim, J.-S. Chung, Evan K Insani Song-yul Oh, B. Kahng
Bulletin of the American Physical Society, 2007