2024 한국반도체학술대회

Tailoring the Composition and Morphology of RuOx (0≤x≤2) Recombination Layers for High Efficiency Perovskite Tandem Solar Cells

2024

2024 한국반도체학술대회

Tailoring Composition of N-doped In2O3 Grown by Atomic Layer Deposition for Optimizing the Ferromagnetic and Semiconductor Properties

2024

2024 한국반도체학술대회

Plasma-enhanced Atomic Layer Deposition of TiN/Mo2N Stacks for Advanced Strorage Nodes in Next-generation DRAM Capacitors

2024

2024한국반도체학술대회

Fabrication of MoO2 Electrode by Thermal Atomic Layer Deposition for High-performance TiO2-Based DRAM Capacitors

2024

2024 한국반도체학술대회

Atomic Layered Deposition of SnO2 Thin Films Using a Novel Sn Precursor

2024