Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
Kim, HY (Kim, Hyo Yeon), Jung, EA (Jung, Eun Ae), Mun, G (Mun, Geumbi), Agbenyeke, RE (Agbenyeke, Rap, Park, BK (Park, Bo Keun), Park, JS (Park, Jin-Seong), Son, SU (Son, Seung Uk), Jeon, DJ (Jeon, Dong Ju), Park, SHK (Park, Sang-Hee Ko), Chung, TM (Chung, Taek-Mo), Han, JH (Han, Jeong Hwan)...M
ACS APPLIED MATERIALS INTERFACES, 201610