Improved Initial Growth Behavior of Sr and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}(2) as Sr-Precursor
Lee, W (Lee, Woongkyu), Jeon, W (Jeon, Woojin), An, CH (An, Cheol Hyun), Chung, MJ (Chung, Min Jung), Kim, HJ (Kim, Han Joon), Eom, T (Eom, Taeyong), George, SM (George, Sheby Mar, Park, BK (Park, Bo Keun), Han, JH (Han, Jeong Hwan), Kim, CG (Kim, Chang Gyoun), Chung, TM (Chung, Taek-Mo), Lee, SW (Lee, Sang Woon), Hwang, CS (Hwang, Cheol Seong
CHEMISTRY OF MATERIALS, 201506