Growth of RuO2 Thin Films by Pulsed-Chemical Vapor Deposition Using RuO4 Precursor and 5% H-2 Reduction Gas
Han, JH (Han, Jeong Hwan), Lee, SW (Lee, Sang Woon), Kim, SK (Kim, Seong Keun), Han, S (Han, Sora), Hwang, CS (Hwang, Cheol Seong), Dussarrat, C (Dussarrat, Chris, Gatineau, J (Gatineau, Julien)
CHEMISTRY OF MATERIALS, 201010