Electrical properties of TiO2-based MIM capacitors deposited by TiCl4 and TTIP based atomic layer deposition processes
Hudec, B (Hudec, Boris), Husekova, K (Husekova, Kristin, Tarre, A (Tarre, Aivar), Han, JH (Han, Jeong Hwan), Han, S (Han, Sora), Rosova, A (Rosova, Alica), Lee, W (Lee, Woongkyu), Kasikov, A (Kasikov, Aarne), Song, SJ (Song, Seul Ji), Aarik, J (Aarik, Jaan), Hwang, CS (Hwang, Cheol Seong), Frohlich, K (Froehlich, Karol)
MICROELECTRONIC ENGINEERING, 201107