Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
Lee, K (Lee, Kookjin), Kim, Y (Kim, Yeonsu), Lee, H (Lee, Hyebin), Park, S (Park, Sojeong), Lee, Y (Lee, Yongwoo), Joo, MK (Joo, Min-Kyu), Ji, H (Ji, Hyunjin), Lee, J (Lee, Jaewoo), Chun, J (Chun, Jungu), Sung, M (Sung, Moonsoo), Cho, YH (Cho, Young-Hoon), Kim, D (Kim, Doyoon), Choi, J (Choi, Junhee), Lee, JW (Lee, Jae Woo), Jeon, DY (Jeon, Dae-Young), Choi, SJ (Choi, Sung-Jin), Kim, GT (Kim, Gyu-Tae)...More.
NANOTECHNOLOGY, 202104