발행물
컨퍼런스
45th International Conference on Micro & Nano Engineering
2019
,
Synthesis and Photolithographic Characterization of Phenolic Molecular Resists under Electron-beam and Extreme UV Irradiation
International Conference on Fluorine Chemistry
SYNTHESIS OF HIGHLY FLUORINATED ORGANIC-INORGANIC NANOCOMPOSITES POSSESSING IMPROVED REFRACTIVE INDEX AND PHOTO-PATTERNABILITY
2019 SPIE Advanced Lithography
Imaging behavior of highly fluorinated molecular resists under extreme UV radiation
Fluoropolymer 2018
2018
Degradation of Poly(semi-perfluoroalkyl methacrylate) Thin Films under Electron-Beam Lithography Conditions
FLUOROPOLYMER 2016
2016
Fluorous Materials Chemistry Employing Highly Fluorinated Polymers for Greater Progress of Electronics Technology