발행물
컨퍼런스
The Korean International Semiconductor Conference & Exhibition on Manufacturing Technology 2024 (KISM 2024 BUSAN)
2024
,
Introduction to two-phase flow analysis techniques for fluid dynamic analysis of cleaning processes: volume of fluid, level set, and volume of fluid - level set coupling methods
2024 International Forum on Functional Materials
Computer simulation study for the design of a capacitively coupled plasma reactor for efficient formation of silicon nano particles
3RD INTERNATIONAL FUSION AND PLASMA CONFERENCE (iFPC 2024)
DFT Analysis of The Adsorption of SinH2n+1 on Silicon Surfaces using SiH4/Ar Capacitively Coupled Plasmas for Fast and Uniform Deposition
2024 한국표면공학회 춘계학술대회 특별강습회
플라즈마 공정과 시뮬레이션
The 9th International Conference on Microelectronics and Plasma Technology (ICMAP 2024)
Understanding Radical Generation and Transmission Mechanisms for Optimization of PEALD Processes and Equipment