발행물
컨퍼런스
2018 Asia-Pacific Conference on Plasma and Terahertz Science
2018
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Control of Edge Profiles of Plasma Parameters in a CCP Deposition Reactor
The 7th International Conference on Microelectronics and Plasma Technology (ICMAP 2018)
Importance of Consideration of Thermal Diffusion Effects in a Non-isothermal Capacitively Coupled Plasma Reactor
The 45th IEEE International Conference on Plasma Science (ICOPS 2018)
Effect of Substrate Temperature on Ion Energy and Angle Distribution in a Capacitively Coupled Plasma