발행물
컨퍼런스
The 8th Korea Multi-Scale Mechanics Symposium 2022 (KMSM 2022)
2022
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Simulation of semiconductor fabrication systems using numerical methods
the 47th IEEE International Conference on Plasma Science (ICOPS-2020) and 2nd ASIA Pacific Conference on Plasma and Terahertz Science (APCOPTS-2020)
2020
EFFECTS OF THE ELECTRODE TEMPERATURE ON SPATIAL DISTRIBUTIONS OF PLASMA PARAMETERS IN INTERMEDIATE PRESSURE CAPACITIVELY COUPLED PLASMAS (Invited Talk)
2nd Asia-Pacific Conference on Plasma Physics
2018
Numerical Simulation of Semiconductor Fabrication System
71st Gaseous Electronics Conference
Investigation of the Electron Kinetics in a Capacitively Coupled Plasma of Intermediate Pressure (Torr) Regime
2018 KPS Fall Meeting
Development of Chemistry Database for Dry Plasma Cleaning Simulation in the Recent Semiconductor Industry