발행물
컨퍼런스
13TH VMIC CONF
1996
,
THE EFFECT OF PRECLEANING TREAMENT ON THE FORMATION OF TI-SILICIDE
13TH VMIC CONF.
A NOVEL TUNSTEN BIT-LINE COMPATIBLE WITH COB STRUCTURE
THE CHARACTERISTICS OF LOW RESISTANCE TI-POLYCIDE GATE STRUCTURES WITH DIFFERENT SI-TI COMPOSITIONS
ADVANCED METALLIZATION
CHARACTERISTICS OF PHOTON-ASSISTED LPCVD TUNGSTENNITRIDE FILMS FOR ULSI DRAM APPLICATIONS